000			00486nam a2200145Ia 4500
008			191124s1984||||xx |||||||||||||| ||und||
020			_a0444008691
082			_a670 _bIo
245		0	_aIon implantation and ion beam processing of materials : _bsymposium held November 1983 in Boston, Massachusetts, U.S.A. / _ceditors, G.K. Hubler ... [et al.].
260			_aNew York : _bNorth-Holland, _cc1984.
300			_a786 p. :
650			_aMaterials
700			_aUnited States.
942			_cBK
999			_c398892 _d398892