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Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. / editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg.

by United States.

Material type: TextBook Publisher: New York : North-Holland, c1983Availability: Items available for loan: School of Physical Sciences (1). Location(s): SPS 621.38152 2 Os3 La.

Ion implantation and ion beam processing of materials : symposium held November 1983 in Boston, Massachusetts, U.S.A. / editors, G.K. Hubler ... [et al.].

by United States.

Material type: TextBook Publisher: New York : North-Holland, c1984Availability: Items available for loan: School of Physical Sciences (1). Location(s): SPS 670 H8636 Io.

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